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A New Paper Published in JMEMS by the Group

posted Oct 26, 2011, 1:25 PM by Khaled salama   [ updated Dec 16, 2011, 1:07 AM ]
A paper entitled: "RF MEMS Fractal Capacitors with High Self Resonant Frequencies" coauthored by Dr. Elshurafa, Dr. Radwan, Dr. Emira, and Dr. Salama has been published in the IEEE/ASME Journal of Microelectromechanical Systems (JMEMS). This journal is widely accepted to be the most reputable and most prestigious journal in the field of MEMS.

For more information regarding this paper, please visit: 
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6095305

Congratulations!


Optical Profiler of Parallel Plate: An optical profiler image of the conventional parallel plate capacitor showing significant residual stress warping.




Optical Profiler of Fractal: An optical profiler image of the fifth-order Moore's fractal capacitor showing no residual stress warping.


SEM Caption: An SEM of one of the fabricated capacitors, showing a fifth-order Moore's fractal.
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