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A New Paper Published in JMEMS by the Group

posted Oct 26, 2011, 1:25 PM by Khaled salama   [ updated Dec 16, 2011, 1:07 AM ]
A paper entitled: "RF MEMS Fractal Capacitors with High Self Resonant Frequencies" coauthored by Dr. Elshurafa, Dr. Radwan, Dr. Emira, and Dr. Salama has been published in the IEEE/ASME Journal of Microelectromechanical Systems (JMEMS). This journal is widely accepted to be the most reputable and most prestigious journal in the field of MEMS.

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Optical Profiler of Parallel Plate: An optical profiler image of the conventional parallel plate capacitor showing significant residual stress warping.

Optical Profiler of Fractal: An optical profiler image of the fifth-order Moore's fractal capacitor showing no residual stress warping.

SEM Caption: An SEM of one of the fabricated capacitors, showing a fifth-order Moore's fractal.