PolyMUMPS

Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications

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Amro Elshurafa, et al., "Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications." Micro & Nano Letters 7, (5), 2012, 419. In this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and

Low voltage RF MEMS variable capacitor with linear CV response

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Amro Elshurafa, et al., "Low voltage RF MEMS variable capacitor with linear CV response." Electronics letters 48 (7), 2012, 392.. An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1 GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8 V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the

Achieving nanoscale horizontal separations in the standard 2 μm PolyMUMPS process

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Amro M Elshurafa, et al., "Achieving nanoscale horizontal separations in the standard 2 μm PolyMUMPS process." Applied Nanoscience 4 (2), 2014, 241. This paper shares with the research community how to achieve, effectively and easily, lateral submicron separations in the standard 2 μm PolyMUMPS process without any fabrication intervention or post-processing, based on the oxide sidewall spacer technique. Thousands of nanoseparations were created and successfully tested by visual inspection and by a simple capacitance measurement. The lateral separations attained were less than 440 nm and