MEMS

Differential RF MEMS interwoven capacitor immune to residual stress warping

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Amro M. Elshurafa, , et al., "Differential RF MEMS interwoven capacitor immune to residual stress warping." Micro & Nano Letters 7 (7), 2012, 658. A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing

Low voltage RF MEMS variable capacitor with linear CV response

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Amro Elshurafa, et al., "Low voltage RF MEMS variable capacitor with linear CV response." Electronics letters 48 (7), 2012, 392.. An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1 GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8 V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the

Two-layer radio

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Amro Elshurafa, et al., "Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications." Micro & Nano Letters 7 (5), 2012, 419. In this letter, we fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art singlelayer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S

Abdullah Bukhamsin

Abdullah Bukhamsin is a Ph.D. student at the Sensors Lab, in the Bioengineering Department, under the supervision of Professor Khaled Nabil Salama at KAUST. Prior to this, Abdullah obtained an M.S. Degree in Engineering under the supervision of Professor Jurgen Kosel at King Abdullah University of Science and Technology (KAUST). Education and Early Career Abdullah Bukhamsin received his B.Sc. degree in Bioengineering from Rice University (Houston, Texas) in 2018. Following that, he completed his M.Sc. degree in Electrical Engineering from King Abdullah University of Science and Technology